Argon Excimer Light Cleaning Device
Product Outline
Organic compounds are decomposed and cleaned with "vacuum ultraviolet rays with a wavelength of 126 nm" emitted by "Ar Excimer". Precision cleaning equipment that enables non-contact, non-damaging cleaning.
Features
- Removes only organic compounds on the extreme surface.
- Makes damage-free and oxidation-free cleaning possible.
- Low penetration of materials, the decomposition range is limited to the extreme surface.
Cleaning Method
- Uses 126nm vacuum ultraviolet photons from Argon excimer emission.
- Vacuum ultraviolet photons decompose organic matter on the surface of the material.
- The decomposed organic matter is discharged from the chamber.
Confirmation of cleaning effect
- The appropriate wave length differs depend on the target organic matter.
- Verification before implementation is possible.